579211
Tetrakis(dimethylamido)zirconium(IV)
electronic grade, ≥99.99% trace metals basis
Synonym(s):
TDMAZ, Tetrakis(dimethylamino)zirconium(IV)
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About This Item
Linear Formula:
[(CH3)2N]4Zr
CAS Number:
Molecular Weight:
267.53
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352103
MDL number:
grade
electronic grade
assay
≥99.99% trace metals basis
form
solid
reaction suitability
core: zirconium
mp
57-60 °C (lit.)
storage temp.
2-8°C
SMILES string
CN(C)[Zr](N(C)C)(N(C)C)N(C)C
InChI
1S/4C2H6N.Zr/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
InChI key
DWCMDRNGBIZOQL-UHFFFAOYSA-N
Application
Tetrakis(dimethylamido) zirconium (IV) may be used as a precursor for atomic layer deposition of zirconium which find applications ranging from gas sensors to high-k dielectrics in microelectronics.
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signalword
Danger
hcodes
target_organs
Respiratory system
supp_hazards
Storage Class
4.3 - Hazardous materials which set free flammable gases upon contact with water
wgk
WGK 3
flash_point_f
No data available
flash_point_c
No data available
ppe
Eyeshields, Gloves, type P3 (EN 143) respirator cartridges
Hazard Classifications
Eye Irrit. 2 - Flam. Sol. 1 - Skin Irrit. 2 - STOT SE 3 - Water-react. 2
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