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331635

Tetramethylammonium hydroxide solution

25 wt. % in H₂O, solution

Synonym(s):

TMAH solution

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About This Item

Linear Formula:
(CH3)4N(OH)
CAS Number:
75-59-2
Molecular Weight:
91.15
NACRES:
NA.21
PubChem Substance ID:
24859984
UNSPSC Code:
12352100
MDL number:
MFCD00008280
Beilstein/REAXYS Number:
3558708
Concentration:
25 wt. % in H2O
Form:
liquid
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Product Name

Tetramethylammonium hydroxide solution, 25 wt. % in H2O

vapor pressure

17.5 mmHg ( 20 °C)

Quality Segment

200

form

liquid

reaction suitability

core: ammonium

concentration

25 wt. % in H2O

refractive index

n20/D 1.3806

pH

>13 (20 °C)

solubility

water: soluble

density

1.016 g/mL at 25 °C

functional group

amine

SMILES string

[OH-].C[N+](C)(C)C

InChI

1S/C4H12N.H2O/c1-5(2,3)4;/h1-4H3;1H2/q+1;/p-1

InChI key

WGTYBPLFGIVFAS-UHFFFAOYSA-M

General description

Tetramethylammonium hydroxide solution is commonly used as a strong base and nucleophilic source in organic synthesis reactions.

Application

Tetramethylammonium hydroxide is a quaternary ammonium salt generally used as an anisotropic etchant for silicon due to its high silicon etching rate.
Tetramethylammonium hydroxide solution (25 wt.% solution in water) may be used as a base for pH adjustment to obtain hexagonal mesoporous aluminophosphate (TAP).

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Danger

Hazard Classifications

Acute Tox. 1 Dermal - Acute Tox. 2 Oral - Aquatic Chronic 2 - Eye Dam. 1 - Skin Corr. 1B - STOT RE 1 Dermal - STOT SE 1

target_organs

Central nervous system, Liver,thymus

Storage Class

6.1B - Non-combustible acute toxic Cat. 1 and 2 / very toxic hazardous materials

wgk

WGK 3

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter

Regulatory Listings

Regulatory Listings are mainly provided for chemical products. Only limited information can be provided here for non-chemical products. No entry means none of the components are listed. It is the user’s obligation to ensure the safe and legal use of the product.

Poisonous substance

pdsc

Class I Designated Chemical Substances

prtr

Substances Subject to be Indicated Names

ishl_indicated

Substances Subject to be Notified Names

ishl_notified

331635-250ML:4.548173321172E12 + 331635-1L:4.548173321165E12

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Certificates of Analysis (COA)

Lot/Batch Number
MKAA2126
1419730
75896LJ
1397409
04330DJ

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Synthesis of mesoporous hexagonal titanium aluminophosphate molecular sieves and their catalytic applications
Kapoor MP & Raj A.
Applied Catalysis A: General, 203(2), 311-319 (2000)
The characteristic behavior of TMAH water solution for anisotropic etching on both silicon substrate and SiO 2 layer.
Chen PH, et al.
Sensors and actuators A, Physical, 93(2), 132-137 (2001)
Study on anisotropic silicon etching characteristics in various surfactant-added tetramethyl ammonium hydroxide water solutions.
Yang CR, et al.
Journal of Micromechanics and Microengineering, 15(11), 2028-2028 (2005)
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