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Merck

759414

Tetraethyl orthosilicate

packaged for use in deposition systems

Synonym(s):

Tetraethyl orthosilicate, Orthosilicic acid tetraethyl ester, Silicon tetraethoxide, Tetraethoxysilane, Tetraethoxysilicon(IV), Tetraethyl silicate, TEOS

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About This Item

Linear Formula:
Si(OC2H5)4
CAS Number:
78-10-4
Molecular Weight:
208.33
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
329766783
EC Number:
201-083-8
Beilstein/REAXYS Number:
1422225
MDL number:
MFCD00009062

Key Documents

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InChI key

BOTDANWDWHJENH-UHFFFAOYSA-N

InChI

1S/C8H20O4Si/c1-5-9-13(10-6-2,11-7-3)12-8-4/h5-8H2,1-4H3

SMILES string

CCO[Si](OCC)(OCC)OCC

vapor density

7.2 (vs air)

vapor pressure

<1 mmHg ( 20 °C)

assay

≥99.5% (GC)

form

liquid

refractive index

n20/D 1.382 (lit.)

bp

168 °C (lit.)

density

0.933 g/mL at 20 °C (lit.)

Quality Level

100

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Application

Commonly used as a precursor to prepare xerogel
Tetraethyl orthosilicate (TEOS) is an oxygen containing precursor of Si used for the deposition of:
  • Si oxide
  • Oxycarbide
  • Doped silicate
  • Silanol
  • Siloxane polymer
  • Organosilicon thin films

The films can be deposited at low temperatues (<250 °C). TEOS is also used to deposit mesoporous and nanoporous thin films of silica. These porous films can be doped during deposition to further enhance their properties.
Will interact with dodecylamine in the formation of intercalation compounds of H+-magadiite and used in a study of mixed-metal bioactive glasses.

pictograms

FlameExclamation mark
GHS02,GHS07

signalword

Warning

Hazard Classifications

Acute Tox. 4 Inhalation - Eye Irrit. 2 - Flam. Liq. 3 - STOT SE 3

target_organs

Respiratory system

Storage Class

3 - Flammable liquids

wgk

WGK 1

flash_point_f

113.0 °F - closed cup

flash_point_c

45 °C - closed cup

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Certificates of Analysis (COA)

Lot/Batch Number
MKBF9200V

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Andreas Kay et al.
Journal of the American Chemical Society, 128(49), 15714-15721 (2006-12-07)
Thin films of silicon-doped Fe2O3 were deposited by APCVD (atmospheric pressure chemical vapor deposition) from Fe(CO)5 and TEOS (tetraethoxysilane) on SnO2-coated glass at 415 degrees C. HRSEM reveals a highly developed dendritic nanostructure of 500 nm thickness having a feature
Nils R Blumenthal et al.
Proceedings of the National Academy of Sciences of the United States of America, 111(45), 16124-16129 (2014-10-29)
Extracellular soluble signals are known to play a critical role in maintaining neuronal function and homeostasis in the CNS. However, the CNS is also composed of extracellular matrix macromolecules and glia support cells, and the contribution of the physical attributes
Seong Cheol Hong et al.
International journal of nanomedicine, 6, 3219-3231 (2012-01-13)
Superparamagnetic iron oxide nanoparticles (SPIONs) have been widely utilized for the diagnosis and therapy of specific diseases, as magnetic resonance imaging (MRI) contrast agents and drug-delivery carriers, due to their easy transportation to targeted areas by an external magnetic field.
Evan M Hetrick et al.
Biomaterials, 30(14), 2782-2789 (2009-02-24)
The ability of nitric oxide (NO)-releasing silica nanoparticles to kill biofilm-based microbial cells is reported. Biofilms of Pseudomonas aeruginosa, Escherichia coli, Staphylococcus aureus, Staphylococcus epidermidis, and Candida albicans were formed in vitro and exposed to NO-releasing silica nanoparticles. Replicative viability
Lin Lin et al.
Colloids and surfaces. B, Biointerfaces, 101, 97-100 (2012-07-17)
Hollow silica spheres with round mesoporous shells were synthesized by core-shell template method, using monodispersed cationic polystyrene particles as core, and TEOS (tetraethoxysilane) as the silica source to form shell. After calcination at 550°C, uniform spheres with a thin shell
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